Title :
Multi-functional integrated sensors for the environment
Author :
Roozeboom, C.L. ; Sim, J.Y. ; Wickeraad, D. ; Dura, B. ; Smith, W.S. ; Hopcroft, M.A. ; Hartwell, P.G. ; Williams, R.S. ; Pruitt, B.L.
Author_Institution :
Stanford Univ., Stanford, CA, USA
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
We present multi-functional integrated sensors for the environment (MFISEs) combining ten sensor functions on a single silicon die. The purpose of the MFISEs chip is to monitor important environmental parameters such as temperature, humidity and air speed, along with acceleration in three axes. Through a common fabrication process and integrated sensor design, the ten sensing functions required only five photolithography mask steps. To our knowledge, MFISEs demonstrates the highest degree of sensor fusion on a single die. Sensor integration is a key enabler of new applications in mobile electronics and wireless sensor networks, and the potential to use MFISEs for ten sensing functions provides significant cost, size, and power savings over ten individual devices.
Keywords :
environmental factors; masks; photolithography; sensor fusion; wireless sensor networks; MFISE chip; acceleration; air speed; environmental parameters; fabrication process; five photolithography mask steps; humidity; integrated sensor design; mobile electronics; multifunctional integrated sensors; sensor functions; sensor fusion; sensor integration; single silicon die; temperature; ten sensing functions; wireless sensor networks; Fluid flow measurement; Humidity; Magnetic sensors; Resistance; Temperature sensors; Wireless sensor networks;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170114
