DocumentCode
3546383
Title
North-finding with 0.004 radian precision using a silicon MEMS quadruple mass gyroscope with Q-factor of 1 million
Author
Prikhodko, I.P. ; Trusov, A.A. ; Shkel, A.M.
Author_Institution
Microsyst. Lab., Univ. of California, Irvine, CA, USA
fYear
2012
fDate
Jan. 29 2012-Feb. 2 2012
Firstpage
164
Lastpage
167
Abstract
We demonstrate north-finding capability with a measured 4 milliradian (mrad) 1-σ uncertainty using an in-house developed vibratory silicon MEMS quadruple mass gyroscope (QMG). We instrumented a vacuum packaged QMG with isotropic Q-factor of 1.2 million and bias instability of 0.1°/hr for azimuth detection by measuring the Earth´s rotation. Continuous rotation (“carouseling”) produced azimuth datapoints with uncertainty diminishing as the square root of the number of turns. Integration of 100 datapoints with normally distributed errors reduced uncertainty to 4 mrad, beyond the noise limit of the QMG. We also implemented self-calibration methods, including temperature compensation and discreet ±180° turning (“maytagging”) as potential alternatives to the carouseling.
Keywords
Earth rotation; Q-factor; calibration; compasses; compensation; elemental semiconductors; gyroscopes; measurement errors; measurement uncertainty; microsensors; rotation measurement; silicon; temperature sensors; Earth rotation measurement; Si; azimuth datapoints; azimuth detection; bias instability; continuous rotation; isotropic Q-factor; measurement errors; measurement uncertainty; noise limit; north finding capability; self-calibration methods; temperature compensation; vacuum packaged QMG; vibratory silicon MEMS quadruple mass gyroscope; Azimuth; Earth; Gyroscopes; Micromechanical devices; Temperature measurement; Temperature sensors; Uncertainty;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location
Paris
ISSN
1084-6999
Print_ISBN
978-1-4673-0324-8
Type
conf
DOI
10.1109/MEMSYS.2012.6170119
Filename
6170119
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