• DocumentCode
    3546383
  • Title

    North-finding with 0.004 radian precision using a silicon MEMS quadruple mass gyroscope with Q-factor of 1 million

  • Author

    Prikhodko, I.P. ; Trusov, A.A. ; Shkel, A.M.

  • Author_Institution
    Microsyst. Lab., Univ. of California, Irvine, CA, USA
  • fYear
    2012
  • fDate
    Jan. 29 2012-Feb. 2 2012
  • Firstpage
    164
  • Lastpage
    167
  • Abstract
    We demonstrate north-finding capability with a measured 4 milliradian (mrad) 1-σ uncertainty using an in-house developed vibratory silicon MEMS quadruple mass gyroscope (QMG). We instrumented a vacuum packaged QMG with isotropic Q-factor of 1.2 million and bias instability of 0.1°/hr for azimuth detection by measuring the Earth´s rotation. Continuous rotation (“carouseling”) produced azimuth datapoints with uncertainty diminishing as the square root of the number of turns. Integration of 100 datapoints with normally distributed errors reduced uncertainty to 4 mrad, beyond the noise limit of the QMG. We also implemented self-calibration methods, including temperature compensation and discreet ±180° turning (“maytagging”) as potential alternatives to the carouseling.
  • Keywords
    Earth rotation; Q-factor; calibration; compasses; compensation; elemental semiconductors; gyroscopes; measurement errors; measurement uncertainty; microsensors; rotation measurement; silicon; temperature sensors; Earth rotation measurement; Si; azimuth datapoints; azimuth detection; bias instability; continuous rotation; isotropic Q-factor; measurement errors; measurement uncertainty; noise limit; north finding capability; self-calibration methods; temperature compensation; vacuum packaged QMG; vibratory silicon MEMS quadruple mass gyroscope; Azimuth; Earth; Gyroscopes; Micromechanical devices; Temperature measurement; Temperature sensors; Uncertainty;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
  • Conference_Location
    Paris
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-0324-8
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2012.6170119
  • Filename
    6170119