3D laser lithography combined with Parylene coating for the rapid fabrication of 3D microstructures

This paper describes a simple and rapid process for the fabrication of 3D solid microstructures. We combined a conventional two-photon direct laser writing with a Parylene coating process. Two-photon direct laser writing allows us to make arbitrary 3D nano / micro structures, but it takes a long time to draw a 3D solid structure because the laser scans inside of photo-sensitive materials. Here, we deposited Parylene on the wire frame structure to fill the gap between the wires. This process allows us to rapidly form a solid surface on the wire frame structures. Our method can fabricate a cube of 100 μm × 100 μm × 40 μm 20 times faster compared to the conventional two-photon direct laser writing.