Title :
High conductive organic conjugated polymer patterning with UV-nanoimprint-based surface modification and second doping
Author :
Takamatsu, S. ; Kurihara, K. ; Imai, T. ; Yamashita, T. ; Itoh, T.
Author_Institution :
BEANS Lab., Tsukuba, Japan
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
We reports on a new patterning technique of conjugated polymer (i.e., PEDOT:PSS) with high conductivity which consists of UV-nanoimprinted surface modified substrate and second doping with ethylene glycol. Generally, organic conjugated polymers are very weak to standard photolithography because alcohol or high temperature treatment decreases conductivity of the polymers. Therefore, we proposed new fabrication process where firstly hydrophilic surface is patterned on plastic substrates with UV nano-imprint, PEDOT:PSS water-dispersion is patterned only on the hydrophilic area, then PEDOT:PSS is doped with ethylene glycol for increasing its conductivity. This process is just operated under room temperature and without alcohol and second doping is also produced, which lead to high conductivity of PEDOT:PSS.
Keywords :
conducting polymers; doping; hydrophilicity; nanolithography; polymer blends; soft lithography; ultraviolet lithography; PEDOT; PSS; UV nano-imprint; UV-nanoimprint-based surface modification; UV-nanoimprinted surface modified substrate; alcohol treatment; conductive organic conjugated polymer patterning; ethylene glycol; fabrication process; high temperature treatment; hydrophilic area; hydrophilic surface; organic conjugated polymers; patterning technique; plastic substrates; second doping; standard photolithography; water-dispersion; Conductivity; Doping; Fabrication; Films; Polymers; Substrates; Surface treatment;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170139