Simulation of the nonlinearity in clumped-clumped beam MEMS resonator

It is important to study the nonlinearity of MEMS resonators since it affects the performance of the resonators as well as filters and oscillators constructed by them. Based on the equivalent circuit model, the nonlinearity, especially the A-f effect of a Clumped-clumped (C-C) beam MEMS resonator is studied in this research. The established model and simulation procedure enables us to reveal the resonance frequency and amplitude of the electrostatic MEMS resonator under relatively small displacement of the beam. The circuit model is built with mechanical solution and F-V analogy. What´s more, an iterative program is used in this study to depict the A-f effect. The results reveals the change of the output current with frequency response curves by varying the DC bias voltage, the ac excitation voltage and the gap size.