Title :
A flexible underwater pressure sensor array using a conductive elastomer strain gauge
Author :
Yaul, F.M. ; Bulovic, V. ; Lang, J.H.
Author_Institution :
Massachusetts Inst. of Technol., Cambridge, MA, USA
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
This paper presents a flexible underwater pressure sensor array which achieves a 1.5 pascal pressure resolution using a 16-bit analog/digital converter. Each sensor consists of a polydimethysiloxane (PDMS) diaphragm and a resistive strain gauge made of a conductive carbon black-PDMS composite. A functional linear array of four sensors with a 15 mm center-to-center spacing is demonstrated, and the dynamic response of the sensors is characterized and modeled.
Keywords :
carbon; diaphragms; elastomers; filled polymers; pressure sensors; sensor arrays; strain gauges; underwater equipment; PDMS diaphragm; analog-digital converter; conductive carbon composite; conductive elastomer strain gauge; dynamic response; flexible underwater pressure sensor array; functional linear array; polydimethysiloxane; Arrays; Carbon; Cavity resonators; Mathematical model; Resistance; Sensitivity; Strain;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170172
