Title :
A new electronic scheme to compensate MEMS resonators nonlinearities
Author :
Levy, R. ; Papin, G.
Author_Institution :
ONERA (French Aerosp. Lab.), Chatillon, France
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
MEMS resonators are used for miniature time references and vibrating sensors. The mechanical nonlinearities of such micro resonators limit their power handling and thus the frequency stability and phase noise of MEMS resonators based oscillators. This paper reports a new circuit scheme to compensate the nonlinear behavior of MEMS resonators. Simulations and experimental results show the effective nonlinearity compensation.
Keywords :
micromechanical resonators; microsensors; oscillators; MEMS resonator based oscillators; MEMS resonator nonlinearities; electronic scheme; frequency stability; mechanical nonlinearities; microresonators; phase noise; vibrating sensors;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170174
