Title :
A new method for resonant sensing based on noise in nonlinear MEMS
Author :
Burgner, C.B. ; Shaw, L.A. ; Turner, K.L.
Author_Institution :
Univ. of California, Santa Barbara, CA, USA
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
This paper investigates a new method for tracking parameters at which dynamic bifurcations occur in MEMS. Taking advantage of the changes in phase and amplitude which precede a critical pitchfork bifurcation, feedback control of the root mean square of the amplitude can be utilized to stabilize a device on the "edge" of instability. This can then be used as a method of tracking parameter changes in the device, e.g., as a mass sensor. Sensitivity to these device parameters is explored and initial results show sensitivity of 50 ppm for vibration amplitudes near the noise floor.
Keywords :
bifurcation; micromechanical devices; sensors; critical pitchfork bifurcation; dynamic bifurcation; feedback control; mass sensor; nonlinear MEMS; resonant sensing; root mean square; sensitivity; vibration amplitudes; Bifurcation; Manifolds; Micromechanical devices; Noise; Resonant frequency; Sensors; Vibrations;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170175
