• DocumentCode
    3546631
  • Title

    Inkjet printed all-polymer flexural plate wave sensors

  • Author

    Busch, J.R. ; Sielmann, C. ; Man, G. ; Tsan, D. ; Walus, K. ; Stoeber, B.

  • Author_Institution
    Univ. of British Columbia, Vancouver, BC, Canada
  • fYear
    2012
  • fDate
    Jan. 29 2012-Feb. 2 2012
  • Firstpage
    571
  • Lastpage
    574
  • Abstract
    We demonstrate an all-polymer flexural-plate-wave gravimetric sensor using piezoelectric PVDF and conductive PEDOT:PSS. An inkjet-printed interdigital transducer (IDT) is used to excite Lamb waves within the film that are measured both electronically, using a second IDT, and mapped directly using a scanning laser Doppler vibrometer. Pulsed wave excitation isolates the weak acoustic signal from the electromagnetic crosstalk, enabling the measurement of relative changes in the resonant frequency, Δf/f0, with the addition of mass, Δm, to the sensing area. A gravimetric mass sensitivity equivalent to Δf/(f0Δm) = -153 cm2/g has been measured for mass loading with a polymer layer.
  • Keywords
    ink jet printing; polymers; sensors; transducers; Lamb waves; electromagnetic crosstalk; gravimetric mass sensitivity; inkjet printed all-polymer flexural plate gravimetric sensor; inkjet-printed interdigital transducer; mass loading; piezoelectric PVDF; polymer layer; pulsed wave excitation; resonant frequency; scanning laser Doppler vibrometer; weak acoustic signal; Acoustic measurements; Acoustics; Films; Frequency measurement; Sensitivity; Sensors; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
  • Conference_Location
    Paris
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-0324-8
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2012.6170181
  • Filename
    6170181