DocumentCode
3546816
Title
Design and fabrication of a vortex inertial sensor consisting of 3-DOF gyroscope and 3-DOF accelerometer
Author
Xie, Zhongjian ; Chang, Honglong ; Yang, Yong ; Li, Xiaoqing ; Zhou, Pingwei ; Yuan, Weizheng
Author_Institution
MEMS Lab., Northwestern Polytech. Univ., Xi´´an, China
fYear
2012
fDate
Jan. 29 2012-Feb. 2 2012
Firstpage
551
Lastpage
554
Abstract
This paper reports a novel vortex multi-axis inertial sensor, which can detect three components of angular rate and three components of linear acceleration simultaneously. It uses a vortex gas flow instead of the traditional linear gas flow as the inertial mass to detect the angular rate and linear acceleration. In the implementation, the vortex was formed by jetting the gas into a round chamber through two opposing nozzle orifices in the opposite direction. And the multi-axis detection was realized by a proper configuration of thermistors. The test results show that both the gyroscopes and accelerometers can reach a medium accuracy, which proves the feasibility of the device.
Keywords
accelerometers; gyroscopes; microsensors; nozzles; thermistors; 3-DOF accelerometer; 3-DOF gyroscope; angular rate; linear acceleration; linear gas flow as; nozzle orifices; vortex gas flow; vortex multi-axis inertial sensor; Acceleration; Fluid flow; Gyroscopes; Orifices; Resistance; Sensors; Thermistors; 3-axis accelerometer; 3-axis gyroscope; Vortex inertial sensor; thermal convective; thermistor;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location
Paris
ISSN
1084-6999
Print_ISBN
978-1-4673-0324-8
Type
conf
DOI
10.1109/MEMSYS.2012.6170235
Filename
6170235
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