• DocumentCode
    3546816
  • Title

    Design and fabrication of a vortex inertial sensor consisting of 3-DOF gyroscope and 3-DOF accelerometer

  • Author

    Xie, Zhongjian ; Chang, Honglong ; Yang, Yong ; Li, Xiaoqing ; Zhou, Pingwei ; Yuan, Weizheng

  • Author_Institution
    MEMS Lab., Northwestern Polytech. Univ., Xi´´an, China
  • fYear
    2012
  • fDate
    Jan. 29 2012-Feb. 2 2012
  • Firstpage
    551
  • Lastpage
    554
  • Abstract
    This paper reports a novel vortex multi-axis inertial sensor, which can detect three components of angular rate and three components of linear acceleration simultaneously. It uses a vortex gas flow instead of the traditional linear gas flow as the inertial mass to detect the angular rate and linear acceleration. In the implementation, the vortex was formed by jetting the gas into a round chamber through two opposing nozzle orifices in the opposite direction. And the multi-axis detection was realized by a proper configuration of thermistors. The test results show that both the gyroscopes and accelerometers can reach a medium accuracy, which proves the feasibility of the device.
  • Keywords
    accelerometers; gyroscopes; microsensors; nozzles; thermistors; 3-DOF accelerometer; 3-DOF gyroscope; angular rate; linear acceleration; linear gas flow as; nozzle orifices; vortex gas flow; vortex multi-axis inertial sensor; Acceleration; Fluid flow; Gyroscopes; Orifices; Resistance; Sensors; Thermistors; 3-axis accelerometer; 3-axis gyroscope; Vortex inertial sensor; thermal convective; thermistor;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
  • Conference_Location
    Paris
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-0324-8
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2012.6170235
  • Filename
    6170235