• DocumentCode
    3546819
  • Title

    DNA origami imaging with 10.9 MHz AFM MEMS probes

  • Author

    Walter, B. ; Mairiaux, E. ; Xiong, Z. ; Faucher, M. ; Buchaillot, L. ; Legrand, B.

  • Author_Institution
    Inst. d´´Electron., de Microelectron. et de Nanotechnol. - IEMN, Villeneuve-d´´Ascq, France
  • fYear
    2012
  • fDate
    Jan. 29 2012-Feb. 2 2012
  • Firstpage
    555
  • Lastpage
    558
  • Abstract
    For the first time, 100nm side DNA origami squares have been imaged using 10.9MHz laserless AFM MEMS probe. This sensor takes advantage of the high resonance frequency of a silicon bulk mode resonator integrating a nano-tip fabricated in batch process. After integration in a commercially available AFM set-up with a modified probe holder, the AFM MEMS probe has demonstrated its capability of soft matter imaging.
  • Keywords
    atomic force microscopy; batch processing (industrial); biomedical imaging; microsensors; DNA origami imaging; DNA origami squares; batch process; frequency 10.9 MHz; laserless AFM MEMS probe; modified probe holder; nano-tip; silicon bulk mode resonator; Electrodes; Measurement by laser beam; Nanobioscience; Optical resonators; Probes; Resonant frequency; Vibrations;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
  • Conference_Location
    Paris
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-0324-8
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2012.6170236
  • Filename
    6170236