DocumentCode
3546819
Title
DNA origami imaging with 10.9 MHz AFM MEMS probes
Author
Walter, B. ; Mairiaux, E. ; Xiong, Z. ; Faucher, M. ; Buchaillot, L. ; Legrand, B.
Author_Institution
Inst. d´´Electron., de Microelectron. et de Nanotechnol. - IEMN, Villeneuve-d´´Ascq, France
fYear
2012
fDate
Jan. 29 2012-Feb. 2 2012
Firstpage
555
Lastpage
558
Abstract
For the first time, 100nm side DNA origami squares have been imaged using 10.9MHz laserless AFM MEMS probe. This sensor takes advantage of the high resonance frequency of a silicon bulk mode resonator integrating a nano-tip fabricated in batch process. After integration in a commercially available AFM set-up with a modified probe holder, the AFM MEMS probe has demonstrated its capability of soft matter imaging.
Keywords
atomic force microscopy; batch processing (industrial); biomedical imaging; microsensors; DNA origami imaging; DNA origami squares; batch process; frequency 10.9 MHz; laserless AFM MEMS probe; modified probe holder; nano-tip; silicon bulk mode resonator; Electrodes; Measurement by laser beam; Nanobioscience; Optical resonators; Probes; Resonant frequency; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location
Paris
ISSN
1084-6999
Print_ISBN
978-1-4673-0324-8
Type
conf
DOI
10.1109/MEMSYS.2012.6170236
Filename
6170236
Link To Document