DocumentCode
3547023
Title
Phononic BandGap coupled Bulk Acoustic wave Resonators
Author
Rottenberg, X. ; Jansen, R. ; Tilmans, H.A.C.
Author_Institution
Imec v.z.w., Leuven, Belgium
fYear
2012
fDate
Jan. 29 2012-Feb. 2 2012
Firstpage
725
Lastpage
728
Abstract
This paper presents the design, a (equivalent circuit) model and the characterization of coupled Bulk Acoustic wave Resonators (BARs) using Phononic BandGaps (PBGs) as coupling elements. Bar-type BARs are represented as 1D acoustic transmission lines to describe all harmonic acoustic extensional-mode resonances, and, further, the lumped network representation of PBGs with purely reactive elements defining the equivalent of non-propagating 1D metamaterials is discussed. Measured transmission data, in good agreement with their simulated counterparts, establish the validity of the derived models that thus effectively depict the behaviours of BARs, PBGs and PBG coupled BARs. This work opens perspective for the design and realisation of left-handed acoustic TLs by implementing mixed acoustic plasma media of the type demonstrated in this paper.
Keywords
RLC circuits; acoustic resonators; bulk acoustic wave devices; equivalent circuits; lumped parameter networks; transmission line theory; 1D acoustic transmission lines; bar type BAR; bulk acoustic wave resonators; equivalent circuit; harmonic acoustic extensional mode; left handed acoustic transmission line; lumped network representation; mixed acoustic plasma media; phononic bandgap; Acoustics; Bars; Couplings; Integrated circuit modeling; Metamaterials; Resonant frequency; MEMS; PBG; acoustic transmission line; coupled resonators; metamaterial; phononic bandgap;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location
Paris
ISSN
1084-6999
Print_ISBN
978-1-4673-0324-8
Type
conf
DOI
10.1109/MEMSYS.2012.6170288
Filename
6170288
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