• DocumentCode
    3547023
  • Title

    Phononic BandGap coupled Bulk Acoustic wave Resonators

  • Author

    Rottenberg, X. ; Jansen, R. ; Tilmans, H.A.C.

  • Author_Institution
    Imec v.z.w., Leuven, Belgium
  • fYear
    2012
  • fDate
    Jan. 29 2012-Feb. 2 2012
  • Firstpage
    725
  • Lastpage
    728
  • Abstract
    This paper presents the design, a (equivalent circuit) model and the characterization of coupled Bulk Acoustic wave Resonators (BARs) using Phononic BandGaps (PBGs) as coupling elements. Bar-type BARs are represented as 1D acoustic transmission lines to describe all harmonic acoustic extensional-mode resonances, and, further, the lumped network representation of PBGs with purely reactive elements defining the equivalent of non-propagating 1D metamaterials is discussed. Measured transmission data, in good agreement with their simulated counterparts, establish the validity of the derived models that thus effectively depict the behaviours of BARs, PBGs and PBG coupled BARs. This work opens perspective for the design and realisation of left-handed acoustic TLs by implementing mixed acoustic plasma media of the type demonstrated in this paper.
  • Keywords
    RLC circuits; acoustic resonators; bulk acoustic wave devices; equivalent circuits; lumped parameter networks; transmission line theory; 1D acoustic transmission lines; bar type BAR; bulk acoustic wave resonators; equivalent circuit; harmonic acoustic extensional mode; left handed acoustic transmission line; lumped network representation; mixed acoustic plasma media; phononic bandgap; Acoustics; Bars; Couplings; Integrated circuit modeling; Metamaterials; Resonant frequency; MEMS; PBG; acoustic transmission line; coupled resonators; metamaterial; phononic bandgap;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
  • Conference_Location
    Paris
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-0324-8
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2012.6170288
  • Filename
    6170288