• DocumentCode
    3547145
  • Title

    Scalable suspended carbon nanowire meshes as ultrasensitive electrochemical sensing platforms

  • Author

    Heo, Jeong-Il ; Lim, Yeongjin ; Madou, Marc ; Shin, Heungjoo

  • Author_Institution
    UNIST (Ulsan Nat. Inst. of Sci. & Technol.), South Korea
  • fYear
    2012
  • fDate
    Jan. 29 2012-Feb. 2 2012
  • Firstpage
    878
  • Lastpage
    881
  • Abstract
    This paper presents novel electrochemical sensing platforms consisting of a set of a suspended carbon nanowire mesh electrode of deliberately controlled shape (hexagonal or diamond) and a planar carbon electrode located just below the suspended electrode that achieved the electrochemical current signal amplification of 120 times in a micro-channel by redox cycling of redox species. The carbon sensing platform was fabricated using only series of photolithography and pyrolysis processes which are known as Carbon-MEMS processes enabling production of carbon nano-structures in designed manner without using expensive nanolithography tools. The functionality of the stacked carbon nanoelectrodes were studied using cyclic voltammetry.
  • Keywords
    carbon; electrochemical electrodes; electrochemical sensors; microsensors; nanowires; photolithography; pyrolysis; voltammetry (chemical analysis); carbon sensing platform; carbon-MEMS process; cyclic voltammetry; electrochemical current signal amplification; microchannel; photolithography; planar carbon electrode; pyrolysis processes; redox cycling; scalable suspended carbon nanowire mesh electrode; stacked carbon nanoelectrodes; ultrasensitive electrochemical sensing platforms; Carbon; Diamond-like carbon; Electrodes; Fabrication; Mechanical sensors; Resists;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
  • Conference_Location
    Paris
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-0324-8
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2012.6170326
  • Filename
    6170326