DocumentCode :
3547145
Title :
Scalable suspended carbon nanowire meshes as ultrasensitive electrochemical sensing platforms
Author :
Heo, Jeong-Il ; Lim, Yeongjin ; Madou, Marc ; Shin, Heungjoo
Author_Institution :
UNIST (Ulsan Nat. Inst. of Sci. & Technol.), South Korea
fYear :
2012
fDate :
Jan. 29 2012-Feb. 2 2012
Firstpage :
878
Lastpage :
881
Abstract :
This paper presents novel electrochemical sensing platforms consisting of a set of a suspended carbon nanowire mesh electrode of deliberately controlled shape (hexagonal or diamond) and a planar carbon electrode located just below the suspended electrode that achieved the electrochemical current signal amplification of 120 times in a micro-channel by redox cycling of redox species. The carbon sensing platform was fabricated using only series of photolithography and pyrolysis processes which are known as Carbon-MEMS processes enabling production of carbon nano-structures in designed manner without using expensive nanolithography tools. The functionality of the stacked carbon nanoelectrodes were studied using cyclic voltammetry.
Keywords :
carbon; electrochemical electrodes; electrochemical sensors; microsensors; nanowires; photolithography; pyrolysis; voltammetry (chemical analysis); carbon sensing platform; carbon-MEMS process; cyclic voltammetry; electrochemical current signal amplification; microchannel; photolithography; planar carbon electrode; pyrolysis processes; redox cycling; scalable suspended carbon nanowire mesh electrode; stacked carbon nanoelectrodes; ultrasensitive electrochemical sensing platforms; Carbon; Diamond-like carbon; Electrodes; Fabrication; Mechanical sensors; Resists;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
ISSN :
1084-6999
Print_ISBN :
978-1-4673-0324-8
Type :
conf
DOI :
10.1109/MEMSYS.2012.6170326
Filename :
6170326
Link To Document :
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