DocumentCode :
3547244
Title :
Three dimensional microfluidic design with spincoated micrometer-thin elastomer multilayer
Author :
Binh-Khiem, N. ; Thanh-Vinh, N. ; Matsumoto, K. ; Shimoyama, I.
Author_Institution :
Univ. of Tokyo, Tokyo, Japan
fYear :
2012
fDate :
Jan. 29 2012-Feb. 2 2012
Firstpage :
1109
Lastpage :
1112
Abstract :
We propose a method to fabricate three dimensional microfluidic channel systems with spincoated micrometer-thin elastomer multilayer. We use the molecular diffusion of thin elastomer layers to our advantage and propose a microfluidic fabrication process free of molding and bonding steps. We achieved various expandable three dimensional multilayer channel designs that can have interesting applications.
Keywords :
diffusion; elastomers; microchannel flow; microfabrication; moulding; multilayers; spin coating; bonding method; microfluidic fabrication process; molding method; molecular diffusion process; spincoated micrometer-thin elastomer multilayer; three dimensional microfluidic channel system; three dimensional microfluidic design; three dimensional multilayer channel design; Blood vessels; Fabrication; Microfluidics; Nonhomogeneous media; Resists; Solvents;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
ISSN :
1084-6999
Print_ISBN :
978-1-4673-0324-8
Type :
conf
DOI :
10.1109/MEMSYS.2012.6170356
Filename :
6170356
Link To Document :
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