DocumentCode
3547271
Title
Cantilever actuated by piezoelectric Parylene-C
Author
Kim, Justin Young-Hyun ; Nandra, Mandheerej ; Tai, Yu-Chong
Author_Institution
California Inst. of Technol., Pasadena, MD, USA
fYear
2012
fDate
Jan. 29 2012-Feb. 2 2012
Firstpage
1141
Lastpage
1144
Abstract
We developed the first MEMS cantilever resonator actuated by piezoelectric Parylene-C, which is a new piezoelectric material for its integration into/with MEMS because it can be deposited at room temperature and electrically poled at 200°C with 400V of DC bias. After our first report on Parylene-C as a new piezoelectric material, we demonstrated here the first MEMS cantilever resonator actuated by piezoelectric PA-C.
Keywords
cantilevers; crystal resonators; micromechanical resonators; piezoelectric materials; MEMS cantilever resonator; piezoelectric Parylene-C; piezoelectric material; temperature 200 degC; temperature 293 K to 298 K; voltage 400 V; DVD; Etching; Laser beams; Measurement by laser beam; Micromechanical devices; Resonant frequency;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location
Paris
ISSN
1084-6999
Print_ISBN
978-1-4673-0324-8
Type
conf
DOI
10.1109/MEMSYS.2012.6170364
Filename
6170364
Link To Document