Design and fabrication of a rotary comb-actuated microgripper with high driving efficiency

This paper reports a novel microgripper with high driving efficiency. The proposed microgripper utilizes the rotational motion of rotary comb actuators to grip the target object directly. Therefore, the inefficient conversion system which is commonly used in recent works is avoided. The gripper is fabricated using a SOI process with a 60μm structural layer. Test results show that this gripper achieves a displacement of 94μm with a driving voltage of 100V and its driving efficiency is increased at least 12 times compared to the existing microgrippers.