Trench-filled cellular parylene structure for piezoelectric polymer electret

Author

Feng, Y. ; Hagiwara, K. ; Iguchi, Y. ; Suzuki, Y.

Author_Institution

Dept. of Mech. Eng., Univ. of Tokyo, Tokyo, Japan

fYear

2012

fDate

Jan. 29 2012-Feb. 2 2012

Firstpage

1189

Lastpage

1192

Abstract

In this paper, we report a novel cellular polymer electret based on trench-filled parylene, and demonstrate its performance for low-resonant-frequency in-plane electromechanical transducer. Cellular parylene structures with 15 μm-wide beams have been successfully microfabricated, and charges are implanted onto the vertical walls with soft X-ray charging as artificial dipoles. The dipole moments are changed due to the cellular gap extension/shrinkage, producing voltage across the cellular structures. With our early prototype, 0.116 Vp-p output has been obtained at 28 Hz and 1 G acceleration, showing the feasibility of MEMS-based multi-layer cellular polymer electrets for in-plane piezoelectric transducers.

Keywords

electrets; electromechanical effects; microfabrication; microsensors; piezoelectric transducers; polymer foams; MEMS-based multilayer cellular polymer electrets; artificial dipoles; cellular gap extension; cellular gap shrinkage; cellular polymer electret; dipole moments; low resonant frequency in-plane electromechanical transducer; microfabrication; piezoelectric polymer electret; soft X-ray charging; trench-filled cellular parylene structure; Acceleration; Electrets; Micromechanical devices; Polymers; Sensitivity; Silicon; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on

Conference_Location

Paris

ISSN

1084-6999

Print_ISBN

978-1-4673-0324-8

Type

conf

DOI

10.1109/MEMSYS.2012.6170376

Filename

6170376