Ultrasonic electrostatic actuators on a flexible substrate

Author

Kim, Sangpyeong ; Zhang, Xu ; Daugherty, Robin ; Lee, Ed ; Kunnen, George ; Allee, David R. ; Forsythe, Eric ; Chae, Junseok

Author_Institution

Arizona State Univ., Tempe, AZ, USA

fYear

2012

fDate

Jan. 29 2012-Feb. 2 2012

Firstpage

1193

Lastpage

1196

Abstract

We present a MEMS-based electrostatic actuator on a flexible substrate, made of Polyethylene Naphthalate (PEN), which emits acoustic waves at ultrasonic frequencies, aiming for an ultrasound microdevice for equipment inspection. The actuator has a suspended diaphragm, made of parylene, of 2-6 mm diameter and a 6 μm gap between the diaphragm and substrate. A single actuator emits ultrasonic waves at 25 kHz, and pressure of 27 dB SPL (sound pressure level) and a 1 × 2 array emits up to 34.6 dB SPL at 1 cm distance.

Keywords

acoustic waves; diaphragms; electrostatic actuators; inspection; ultrasonic transducers; acoustic waves; equipment inspection; flexible substrate; frequency 25 kHz; polyethylene naphthalate; size 2 mm to 6 mm; size 6 mum; sound pressure level; suspended diaphragm; ultrasonic electrostatic actuators; ultrasound microdevice; Acoustics; Actuators; Aluminum; Arrays; Micromechanical devices; Microphones; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on

Conference_Location

Paris

ISSN

1084-6999

Print_ISBN

978-1-4673-0324-8

Type

conf

DOI

10.1109/MEMSYS.2012.6170377

Filename

6170377