Optimum temperature control of micro devices under high-speed thermal disturbances

We have developed a versatile optimal control scheme for efficient suppression of high-speed temperature variation in micro devices. Surface heat flux applied with a thin-film heater is employed as the control input. Our proposed scheme employs adjoint-based optimization method, which offers the optimal heat input so as to minimize temperature changes of a thin active layer embedded in a modeled laser diode. Both in numerical simulations and MEMS-based experiments, we have successfully suppressed the temperature variation during the laser emission by more than 60% with the present control.