Direct-write single-walled carbon nanotube serpentines using micro chemical vapor deposition

This work presents the capability to grow and deposit single-walled carbon nanotubes (SWNTs) with good position and orientation control toward fully controlled nanomanufacturing. A miniaturized growth platform as the micro chemical vapor deposition system is built by a micromachining process for the synthesis of SWNTs. A collector substrate is placed 50 microns above the growth platform for the depositions of SWNTs. The movements of the collector are continuously controlled by an x-y nanopositioner. Experimentally, depositions of SWNTs in serpentine-shape have been demonstrated. A growth model is proposed and supported by results from various guiding gas flow rates and substrate movements.