Laser chemical processing for three-dimensional microstructures

Author

Stuke, M.

Author_Institution

Max-Planck-Inst. fur Biophys. Chem., Gottingen, Germany

fYear

1998

fDate

3-8 May 1998

Firstpage

509

Abstract

Summary form only given. Removal of material or deposition-both with spatial control-can be induced by interaction of laser light with surfaces that are in contact with a suitable chemical environment. This talk will focus on three topics: (a) laser ablation of metals with short UV pulses, (b) laser direct write three-dimensional (3D) deposition of 3D microstructures, and (c) laser fabrication of a microchannel system in PMMA by UV excimer laser ablation.

Keywords

excimer lasers; high-speed optical techniques; laser ablation; laser materials processing; pulsed laser deposition; 3D microstructures; PMMA; UV excimer laser ablation; chemical environment; laser ablation; laser chemical processing; laser direct write 3D deposition; laser fabrication; laser light interactions; metals; microchannel system; short UV pulses; spatial control; three-dimensional microstructures; Chemical lasers; Chemical processes; Laser ablation; Lighting control; Microstructure; Optical control; Optical materials; Optical pulses; Pulsed laser deposition; Surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 1998. CLEO 98. Technical Digest. Summaries of papers presented at the Conference on

Conference_Location

San Francisco, CA, USA

Print_ISBN

1-55752-339-0

Type

conf

DOI

10.1109/CLEO.1998.676559

Filename

676559