Test of A CNT gyroscope based on field emission

Author

Zhan Yang ; Nakajima, Masahiro ; Yajing Shen ; Pengbo Wang ; Changhai Ru ; Yahua Zhang ; Lining Sun ; Fukuda, Toshio

Author_Institution

Robot. & Microsyst. Center, Soochow Univ., Suzhou, China

fYear

2013

fDate

10-13 Nov. 2013

Firstpage

59

Lastpage

62

Abstract

A gyroscope based on Coriolis effect and fabricated by Carbon Nanotube (CNT) was presented. The gyroscope was designed A CNT is vibration at x direction, when there a rotation around z direction, acceleration happens to the y direction. The natural frequency of MWCNT is depending on the inner diameter, outer diameter and length. The CNT was driven by the electrostatic force to its nature frequency. A CNT with a length of 1 μm was used for emitter and an anode with a bias angle is etched by Focused Ion Beam (FIB) which is set to the opposite to the CNT. An electrode is set near the CNT tip, which is employed to pulling the CNT for mechanical resonances by an AC voltage. The CNT with a resonate frequency of 1 MHz and mechanical quality factor Q of ~400 was tested at rotation speed of 20 rad.s.

Keywords

Coriolis force; acceleration; carbon nanotubes; design; electrodes; electrostatics; field emission; focused ion beam technology; gyroscopes; nanotube devices; resonance; rotation; sputter etching; vibrations; AC voltage; C; CNT gyroscope fabrication; CNT gyroscope testing; CNT pulling; CNT resonant frequency; CNT vibration direction; Coriolis effect; FIB etching; MWCNT natural frequency; acceleration direction; bias anode angle; carbon nanotube; electrode; electrostatic force; emitter; field emission; focused ion beam; frequency 1 MHz; gyroscope design; inner diameter dependence; length dependence; mechanical quality factor; mechanical resonances; outer diameter dependence; rotation direction; rotation speed; size 1 mum; Anodes; Carbon nanotubes; Gyroscopes; Resonant frequency; Sensors; Vibrations; CNT; Field Emission; Gyroscope; Nanorobotic Manipulation; Resonate Carbon Nanotube;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Molecular Medicine and Engineering (NANOMED), 2013 IEEE 7th International Conference on

Conference_Location

Phuket

Print_ISBN

978-1-4799-2689-3

Type

conf

DOI

10.1109/NANOMED.2013.6766316

Filename

6766316