An AI Based Controller for Temperature Control for a Hot Embossing System

Author

Deodhar, Akash ; Shiakolas, Panos S. ; Belligundu, Sunil

Author_Institution

Mech. & Aerosp. Eng., Texas Univ., Arlington, TX

fYear

2005

fDate

27-29 June 2005

Firstpage

113

Lastpage

118

Abstract

The hot embossing microreplication microfabrication, HEMM, systems are gaining popularity in the MEMS and more specifically the BioMEMS area due to their capability to quickly and inexpensively replicate microstructures on various types of polymers or used for thermal bonding of BioMEMS substrates. Control issues associated with a HEMM system include temperature, heat and force control for process control. This manuscript discussed the procedure for the development of an artificial intelligence based controller using neural networks and fuzzy logic with application to the heating and temperature control of a HEMM system. Subsequently, the controller development in LabVIEW and MATLAB, and its implementation and performance verification on a testbed is presented

Keywords

artificial intelligence; control engineering computing; embossing; micromechanical devices; process control; production engineering computing; temperature control; MEMS; artificial intelligence; fuzzy logic; hot embossing system; microreplication microfabrication; microstructures replication; neural networks; temperature control; thermal bonding; Artificial intelligence; Bonding; Control systems; Embossing; Force control; Micromechanical devices; Microstructure; Polymers; Process control; Temperature control;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent Control, 2005. Proceedings of the 2005 IEEE International Symposium on, Mediterrean Conference on Control and Automation

Conference_Location

Limassol

ISSN

2158-9860

Print_ISBN

0-7803-8936-0

Type

conf

DOI

10.1109/.2005.1467001

Filename

1467001