Dynamics of laser ablation for thin film growth by pulsed laser deposition

Author

Geohegan, D.B. ; Puretzky, A.A.

Author_Institution

Div. of Solid State, Oak Ridge Nat. Lab., TN, USA

fYear

1996

fDate

2-7 June 1996

Firstpage

252

Lastpage

253

Abstract

Summary form only given. Fast imaging and sensitive spectroscopic investigations of laser ablation plume propagation reveal fundamental collisional phenomena relevant to film pulsed laser deposition and optimized cluster growth via laser vaporisation. Two phenomena are detailed, the first involves the splitting of the ablation plume into distinct high- and low energy components as a weak shock front forms during ablation into a low-density background gas. The second involves the dynamics of graphite ablation for vacuum deposition of tetrahedrally coordinated amorphous diamond films.

Keywords

amorphous state; diamond; dynamics; high-speed optical techniques; molecular clusters; optical films; plasma CVD; pulsed laser deposition; thin films; visible spectra; C; ablation plume splitting; fast imaging; film pulsed laser deposition; fundamental collisional phenomena; graphite ablation; laser ablation dynamics; laser ablation plume propagation; laser vaporisation; low-density background gas; optimized cluster growth; pulsed laser deposition; sensitive spectroscopic investigations; tetrahedrally coordinated amorphous diamond films; thin film growth; vacuum deposition; weak shock front; Laser ablation; Nonlinear optics; Optical buffering; Optical films; Optical pulses; Optical pumping; Optical waveguides; Pulsed laser deposition; Quantum well devices; Sputtering;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 1996. CLEO '96., Summaries of papers presented at the Conference on

Conference_Location

Anaheim, CA, USA

Print_ISBN

1-55752-443-2

Type

conf

Filename

864632