Nanometer-scale surface analysis by laser-ablation fluorescence spectroscopy

Author

Oki, Yuji ; Maeda, Munenori ; Hirano, Akira

Author_Institution

Dept. of Electr. Eng., Kyushu Univ., Fukuoka, Japan

fYear

1996

fDate

2-7 June 1996

Firstpage

330

Abstract

Summary form only given. In conclusion, we demonstrated a very low absolute detection limit in Na atoms less than 1 fg with the laser ablation atomic fluorescence (LAAF) spectroscopy. Applying this technique to a solid target, we observed a strong LAAF signal for the ablation of 9-nm thickness. It can be expected that the measurement of the density distribution of a specified element with a spatial resolution less than 1 nm.

Keywords

atomic emission spectroscopy; fluorescence; high-speed optical techniques; laser ablation; measurement by laser beam; optical resolving power; surface structure; time resolved spectroscopy; 9 nm; Na atoms; density distribution; laser ablation atomic fluorescence spectroscopy; laser-ablation fluorescence spectroscopy; nanometer-scale surface analysis; solid target; spatial resolution; strong LAAF signal; very low absolute detection limit; Atom lasers; Atomic beams; Atomic measurements; Density measurement; Fluorescence; Laser ablation; Solids; Spatial resolution; Spectroscopy; Surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 1996. CLEO '96., Summaries of papers presented at the Conference on

Conference_Location

Anaheim, CA, USA

Print_ISBN

1-55752-443-2

Type

conf

Filename

864749