Surface-micromachined Fabry-Perot tunable filter for wavelength-division multiplexing systems

Author

Tran, A.T.T.D. ; Lo, Y.H. ; Zhu, Z.H.

Author_Institution

Sch. of Appl. & Eng. Phys., Cornell Univ., Ithaca, NY, USA

fYear

1996

fDate

2-7 June 1996

Firstpage

346

Abstract

Summary form only given. In conclusion we have developed a low-temperature surface micromachining process that can be applied to various substrates such as Si, glass, and GaAs. We have demonstrated a tunable optical filter with a 60 nm tuning range near 1.5 /spl mu/m, and a transmission linewidth of 5 nm. This device might find applications in WDM systems and optical sensing.

Keywords

integrated optics; micromachining; multiplexing equipment; optical communication equipment; optical fabrication; optical filters; optical sensors; tuning; wavelength division multiplexing; GaAs; Si; WDM systems; glass; low-temperature surface micromachining process; nm tuning range; optical sensing; substrates; surface-micromachined Fabry-Perot tunable filter; transmission linewidth; tunable optical filter; wavelength-division multiplexing systems; Fabry-Perot; Gallium arsenide; Glass; Micromachining; Optical filters; Optical sensors; Optical surface waves; Optical tuning; Surface waves; Wavelength division multiplexing;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 1996. CLEO '96., Summaries of papers presented at the Conference on

Conference_Location

Anaheim, CA, USA

Print_ISBN

1-55752-443-2

Type

conf

Filename

864769