Excimer laser machining by a multiple imaging system using holographic optical elements

Author

Sasagawa, T. ; Yamamoto, Takayuki ; Inoue, M. ; Tanaka, Mitsuru ; Yagi, S.

Author_Institution

Mitsubishi Electr. Corp., Hyogo, Japan

fYear

1996

fDate

2-7 June 1996

Firstpage

376

Lastpage

377

Abstract

Summary form only given. We propose excimer laser machining using a multiple imaging system employing a holographic optical element (HOE). The multiple imaging system can generate many images from one mask pattern. The HOEs that we used were computer-generated phase holograms, the so-called kinoform type. Their diffraction efficiency can theoretically reach 100%.

Keywords

computer-generated holography; excimer lasers; holographic optical elements; laser beam machining; computer-generated phase hologram; excimer laser machining; holographic optical element; kinoform; mask pattern; multiple imaging system; Diffraction; Holographic optical components; Holography; Lenses; Machining; Optical imaging; Optical pulses; Optimized production technology; Substrates; Surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 1996. CLEO '96., Summaries of papers presented at the Conference on

Conference_Location

Anaheim, CA, USA

Print_ISBN

1-55752-443-2

Type

conf

Filename

864813

Link To Document

https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=355076