Title :
Construction of stochastic PDEs for feedback control of surface roughness in thin film deposition
Author :
Ni, Dong ; Christofide, P.D.
Author_Institution :
Dept. of Chem. Eng., California Univ., Los Angeles, CA, USA
Abstract :
In this work, we develop a systematic method for the construction of linear stochastic partial differential equation (PDE) models for feedback control of surface roughness in thin film deposition. The method is applied to a representative deposition process and is successfully validated through simulations.
Keywords :
feedback; linear differential equations; partial differential equations; process control; stochastic processes; surface roughness; thin films; vapour deposition; feedback control; linear stochastic PDE; surface roughness; thin film deposition; Chemical vapor deposition; Feedback control; Kinetic theory; Microscopy; PD control; Rough surfaces; Sputtering; Stochastic processes; Surface morphology; Surface roughness;
Conference_Titel :
American Control Conference, 2005. Proceedings of the 2005
Print_ISBN :
0-7803-9098-9
Electronic_ISBN :
0743-1619
DOI :
10.1109/ACC.2005.1470349
