DocumentCode
3550923
Title
Construction of stochastic PDEs for feedback control of surface roughness in thin film deposition
Author
Ni, Dong ; Christofide, P.D.
Author_Institution
Dept. of Chem. Eng., California Univ., Los Angeles, CA, USA
fYear
2005
fDate
8-10 June 2005
Firstpage
2540
Abstract
In this work, we develop a systematic method for the construction of linear stochastic partial differential equation (PDE) models for feedback control of surface roughness in thin film deposition. The method is applied to a representative deposition process and is successfully validated through simulations.
Keywords
feedback; linear differential equations; partial differential equations; process control; stochastic processes; surface roughness; thin films; vapour deposition; feedback control; linear stochastic PDE; surface roughness; thin film deposition; Chemical vapor deposition; Feedback control; Kinetic theory; Microscopy; PD control; Rough surfaces; Sputtering; Stochastic processes; Surface morphology; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
American Control Conference, 2005. Proceedings of the 2005
ISSN
0743-1619
Print_ISBN
0-7803-9098-9
Electronic_ISBN
0743-1619
Type
conf
DOI
10.1109/ACC.2005.1470349
Filename
1470349
Link To Document