• DocumentCode
    3551368
  • Title

    Low-cost all-polymer integrated circuits

  • Author

    Hart, C.M. ; de Leeuw, D.M. ; Matters, M. ; Herwig, P.T. ; Mutsaerts, C.M.J. ; Drury, C.J.

  • Author_Institution
    Philips Research Laboratories, Eindhoven, Netherlands
  • fYear
    1998
  • fDate
    22-24 Sept. 1998
  • Firstpage
    30
  • Lastpage
    34
  • Abstract
    A technology has been developed to make all-polymer integrated circuits. It involves reproducible fabrication of field-effect transistors in which the semiconducting, conducting and insulating parts are all made of polymers. The fabrication on flexible substrates uses spin-coating of electrically active precursors and patternwise exposure of the deposited films. In the whole process stack-integrity is maintained. Vertical interconnects are made mechanically. As a demonstrator for the technology functional 15-bit programmable code generators are fabricated. These circuits still operate when the foils are sharply bent. Due to the limited number of process steps the technology is potentially inexpensive.
  • Keywords
    Atmosphere; Dielectrics; Electrodes; Insulation life; MOSFETs; Nitrogen; Polyimides; Semiconductor films; Solvents; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference, 1998. ESSCIRC '98. Proceedings of the 24th European
  • Type

    conf

  • DOI
    10.1109/ESSCIR.1998.186203
  • Filename
    1470960