DocumentCode :
3551368
Title :
Low-cost all-polymer integrated circuits
Author :
Hart, C.M. ; de Leeuw, D.M. ; Matters, M. ; Herwig, P.T. ; Mutsaerts, C.M.J. ; Drury, C.J.
Author_Institution :
Philips Research Laboratories, Eindhoven, Netherlands
fYear :
1998
fDate :
22-24 Sept. 1998
Firstpage :
30
Lastpage :
34
Abstract :
A technology has been developed to make all-polymer integrated circuits. It involves reproducible fabrication of field-effect transistors in which the semiconducting, conducting and insulating parts are all made of polymers. The fabrication on flexible substrates uses spin-coating of electrically active precursors and patternwise exposure of the deposited films. In the whole process stack-integrity is maintained. Vertical interconnects are made mechanically. As a demonstrator for the technology functional 15-bit programmable code generators are fabricated. These circuits still operate when the foils are sharply bent. Due to the limited number of process steps the technology is potentially inexpensive.
Keywords :
Atmosphere; Dielectrics; Electrodes; Insulation life; MOSFETs; Nitrogen; Polyimides; Semiconductor films; Solvents; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Circuits Conference, 1998. ESSCIRC '98. Proceedings of the 24th European
Type :
conf
DOI :
10.1109/ESSCIR.1998.186203
Filename :
1470960
Link To Document :
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