DocumentCode
3551368
Title
Low-cost all-polymer integrated circuits
Author
Hart, C.M. ; de Leeuw, D.M. ; Matters, M. ; Herwig, P.T. ; Mutsaerts, C.M.J. ; Drury, C.J.
Author_Institution
Philips Research Laboratories, Eindhoven, Netherlands
fYear
1998
fDate
22-24 Sept. 1998
Firstpage
30
Lastpage
34
Abstract
A technology has been developed to make all-polymer integrated circuits. It involves reproducible fabrication of field-effect transistors in which the semiconducting, conducting and insulating parts are all made of polymers. The fabrication on flexible substrates uses spin-coating of electrically active precursors and patternwise exposure of the deposited films. In the whole process stack-integrity is maintained. Vertical interconnects are made mechanically. As a demonstrator for the technology functional 15-bit programmable code generators are fabricated. These circuits still operate when the foils are sharply bent. Due to the limited number of process steps the technology is potentially inexpensive.
Keywords
Atmosphere; Dielectrics; Electrodes; Insulation life; MOSFETs; Nitrogen; Polyimides; Semiconductor films; Solvents; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference, 1998. ESSCIRC '98. Proceedings of the 24th European
Type
conf
DOI
10.1109/ESSCIR.1998.186203
Filename
1470960
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