Millimeterwave coplanar transmission lines on gallium arsenide, indium phosphide and quartz with finite metalization thickness

Coplanar lines for the millimeter-wave range are required to be of small dimensions, typically 25-50 mu m (ground to ground spacing) for the Wand V-band respectively. The thickness of the metalization typically 0.5 to several microns, cannot be neglected. The effect of gold metalization on the impedance, propagation constant and attenuation is presented theoretically and experimentally for millimeter-wave coplanar lines on gallium arsenide, indium phosphide and quartz. Data are presented for the attenuation of 50 ohm lines of various dimensions and metalization thicknesses.<>