Title :
Differential confocal microscopy with nanometer depth resolution
Author :
Chau-Hwang Lee ; Jyhpyng Wang
Author_Institution :
Inst. of Atomic & Molecular Sci., Acad. Sinica, Taipei, Taiwan
Abstract :
Summary form only given. The depth resolution of conventional confocal microscopy is limited by the numerical aperture to about 0.5 /spl mu/m. In this paper we report our development of a new confocal technique, tentatively called differential confocal microscopy, which can be used to image and profile surface microstructures with depth resolution on the order of 10 nm.
Keywords :
optical microscopy; 10 nm; depth resolution; differential confocal microscopy; numerical aperture; surface microstructure; Atomic force microscopy; Atomic measurements; Biomedical measurements; Calibration; Gratings; Laser stability; Optical microscopy; Power lasers; Red blood cells; Signal resolution;
Conference_Titel :
Lasers and Electro-Optics, 1996. CLEO '96., Summaries of papers presented at the Conference on
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
1-55752-443-2
