Title :
A V-band wafer probe using ridge-trough waveguide
Author_Institution :
Cascade Microtech Inc., Beaverton, OR, USA
Abstract :
A V-band wafer probe was successfully designed and built. A novel waveguide, the ridge-trough waveguide, was used in the transition from rectangular waveguide to coplanar waveguide, and a mathematical model was developed to describe its principal characteristics. A 25X model was built to confirm the mathematical model predictions and to model the performance of the waveguide used in the V-band probe. Reinforced by the 25X model results, a working V-band probe was constructed with bias capability. This probe performed well, and measurements could be easily corrected. Devices were measured at 50-75 GHz to demonstrate that two V-band probes could successfully perform two-port measurements.<>
Keywords :
integrated circuit testing; microwave measurement; probes; semiconductor device testing; test equipment; waveguide components; 50 to 75 GHz; EHF; MM-wave type; V-band; bias capability; coplanar waveguide; mathematical model; millimetre wave operation; rectangular waveguide; ridge-trough waveguide; two-port measurements; wafer probe; Coaxial cables; Conductors; Coplanar transmission lines; Coplanar waveguides; Fingers; Planar waveguides; Probes; Rectangular waveguides; Reflection; Waveguide transitions;
Conference_Titel :
Microwave Symposium Digest, 1991., IEEE MTT-S International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-87942-591-1
DOI :
10.1109/MWSYM.1991.147215