Title :
High-T/sub c/ superconducting high-Q coplanar resonator made on MgO
Author :
Konaka, Tsuneo ; Sato, Makoto ; Asano, Hidefumi ; Kubo, Shyugo ; Nagai, Yasuhiro
Author_Institution :
NTT Transmission Syst. Lab., Ibaraki, Japan
Abstract :
Coplanar two-port transmission line resonators were made using high-T/sub c/ superconducting EuBa/sub 2/Cu/sub 3/O/sub x/ film on an MgO substrate. The EuBa/sub 2/Cu/sub 3/O/sub x/ films were prepared by magnetron sputtering and patterned by photolithography and Ar ion milling. The resonator characteristics were measured as a junction of temperature and power. The highest unloaded Q value obtained was 12500 at 28 K and at 3.9 GHz, and the surface resistance of the film was estimated at about 40 mu Omega . No change in Q values was observed at input power level less than -20 dBm.<>
Keywords :
Q-factor; barium compounds; europium compounds; high-temperature superconductors; magnesium compounds; resonators; strip line components; superconducting devices; superconducting thin films; 28 K; 3.9 GHz; 40 muohm; Ar ion milling; EuBa/sub 2/Cu/sub 3/O/sub x/-MgO; MgO substrate; high-Q coplanar resonator; high-T/sub c/ superconducting films; lithographic patterning; magnetron sputtering; photolithography; surface resistance; two-port transmission line; Argon; Coplanar transmission lines; Lithography; Power transmission lines; Sputtering; Substrates; Superconducting films; Superconducting magnets; Superconducting transmission lines; Surface resistance;
Conference_Titel :
Microwave Symposium Digest, 1991., IEEE MTT-S International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-87942-591-1
DOI :
10.1109/MWSYM.1991.147273
