Title :
Out-of-plane refractive microlens for freespace integrated optics
Author :
King, C.R. ; Lin, Lih Y. ; Wu, Ming C.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Abstract :
Summary form only given. In summary, we believe an out-of-plane spherical microlens standing perpendicular to the substrate has been demonstrated for the first time using surface-micromachining technology. Light emitted from an optical fiber is successfully collimated by the microlens to a divergence angle of 0.15", and the focal length is measured to be 645 /spl mu/m. These microlenses can be combined with other out-of-plane micro-optical components on a silicon substrate to form a free space micro-optical bench.
Keywords :
integrated optics; lenses; micromachining; optical collimators; optical fabrication; optical focusing; 645 mum; divergence angle; focal length measurement; free space micro-optical bench; freespace integrated optics; optical fiber; out-of-plane micro-optical components; out-of-plane refractive microlens; out-of-plane spherical microlens; silicon substrate; substrate; surface-micromachining technology; Integrated optics; Lenses; Microoptics; Optical beams; Optical device fabrication; Optical fibers; Optical refraction; Optical sensors; Resists; Scanning electron microscopy;
Conference_Titel :
Lasers and Electro-Optics, 1996. CLEO '96., Summaries of papers presented at the Conference on
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
1-55752-443-2
