Title :
Surface-emitting microlensed LED and its self-focusing effect
Author :
O-Seung Yang ; Song-Cheol Hong ; Young-Se Kwon
Author_Institution :
Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Seoul, South Korea
Abstract :
Summary form only given. GaAs-AlGaAs backside-emitting microlensed LEDs have been fabricated. Monolithic integration of AlGaAs microlens and conventional LED has been realized by meltback etching of hemisphere and subsequent regrowth of AlGaAs lens layer by liquid phase epitaxy (LPE).
Keywords :
III-V semiconductors; aluminium compounds; etching; gallium arsenide; integrated optics; lenses; light emitting diodes; liquid phase epitaxial growth; optical fabrication; semiconductor growth; AlGaAs lens layer; GaAs-AlGaAs; GaAs-AlGaAs backside-emitting microlensed LEDs; LPE; hemisphere; liquid phase epitaxy; meltback etching; monolithic integration; self-focusing effect; subsequent regrowth; surface-emitting microlensed LED; Etching; Focusing; Gallium arsenide; Lenses; Light emitting diodes; Microoptics; Optical coupling; Optical interconnections; Scanning electron microscopy; Substrates;
Conference_Titel :
Lasers and Electro-Optics, 1996. CLEO '96., Summaries of papers presented at the Conference on
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
1-55752-443-2
