Title :
Growth of 〈100〉 InP single crystals in quartz crucibles using the VGF technique
Author_Institution :
AT&T Bell Lab., Princeton, NJ, USA
Abstract :
The growth of large diameter twin-free InP single crystals in the ⟨100⟩ orientation using the vertical gradient freeze (VGF) technique is discussed. The crystals were grown in quartz crucibles. An etch pit density (EPD) of <2×104/cm2 has been achieved in the ⟨100⟩ quartz-grown crystals. Both low S-doped, n-type (<5×1017/cm3) and high resistivity (<106 Ω-cm) Fe-doped crystals have been grown using this technique. Glow discharge mass spectrometry indicates that the use of a quartz crucible does not result in an unacceptable level of silicon incorporation into the crystal. This result is confirmed by the Hall effect measurement, which indicates that for the same weight percent Fe-doping, the resistivity of quartz-grown crystal is comparable to that of PBN-grown crystal
Keywords :
III-V semiconductors; crystal growth from melt; indium compounds; semiconductor growth; 〈100〉 orientation; Hall effect; III-V semiconductor; InP single crystals; InP:Fe; InP:S; crystal growth; etch pit density; large diameter twin-free; mass spectrometry; quartz crucibles; resistivity; vertical gradient freeze technique; Conductivity; Crystalline materials; Crystals; Etching; Indium phosphide; Iron; Optical microscopy; Pressure control; Stress control; Thermal stresses;
Conference_Titel :
Indium Phosphide and Related Materials, 1991., Third International Conference.
Conference_Location :
Cardiff
Print_ISBN :
0-87942-626-8
DOI :
10.1109/ICIPRM.1991.147335