Title :
Vertical adjustment in surface-micromachined free-space micro-optical bench
Author :
Lin, Lih Y. ; Shen, J.L. ; Lee, S.S. ; Wu, Ming C.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Abstract :
Summary form only given. We have demonstrated a novel optical beam-steering device for vertical adjustment of the optical beams in the surface-micromachined free-space Si micro-optical bench. Vertical adjustment as large as 140 /spl mu/m has been realized. When combined with an integrated microlens, a vertical scanning angle of 5.5/spl deg/ is also demonstrated.
Keywords :
integrated optics; micromachining; mirrors; Si; free-space micro-optical bench; integrated microlens; micromirror; optical beam-steering device; scanning angle; surface micromachining; vertical adjustment; Actuators; Electron optics; Integrated optics; Lenses; Microoptics; Mirrors; Optical beams; Optoelectronic devices; Semiconductor lasers; Substrates;
Conference_Titel :
Lasers and Electro-Optics, 1996. CLEO '96., Summaries of papers presented at the Conference on
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
1-55752-443-2
