DocumentCode
3552469
Title
Ohmic contacts for GaAs devices
Author
Cox, Ronaid H. ; Strack, Hans A. ; Cox, R.H. ; Strack, H.A.
Author_Institution
Texas Instruments Inc., Dallas, Texas
Volume
12
fYear
1966
fDate
1966
Firstpage
36
Lastpage
36
Abstract
Ohmic contacts were developed for GaAs devices, such as transistors and Gunn oscillators. Contacts had to meet the following requirements: 1) they must be ohmic to both low and high resistivity n-and p-type GaAs, 2) they must contact both
Keywords
Conductivity; Diodes; Fabrication; Gallium arsenide; Gunn devices; Impurities; Ohmic contacts; Oscillators; Seals; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1966 International
Type
conf
DOI
10.1109/IEDM.1966.187659
Filename
1474498
Link To Document