• DocumentCode
    3552477
  • Title

    The resonistor - A frequency selective device utilizing the mechanical resonance of a silicon substrate

  • Author

    Wilfinger, R.J. ; Bardell, P.H.

  • Author_Institution
    IBM Components Division, Hopewell Junction, N. Y.
  • fYear
    1966
  • fDate
    26-28 Oct. 1966
  • Firstpage
    40
  • Lastpage
    40
  • Abstract
    This paper describes a tuned monolithic device which utilizes the mechanical resonance of the silicon substrate. The proposed device is compatible with monolithic technology and will operate from a few hundred cycles to tens of kilocycles.
  • Keywords
    Bridge circuits; Coupling circuits; Insertion loss; Piezoresistance; Resistors; Resonance; Resonant frequency; Silicon; Stress; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1966 International
  • Conference_Location
    Washington, DC, USA
  • Type

    conf

  • DOI
    10.1109/IEDM.1966.187665
  • Filename
    1474504
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3552477