DocumentCode :
3552669
Title :
Wafer-chip assembly for large-scale integration
Author :
Kraynak, P. ; Fletcher, Peter
Volume :
13
fYear :
1967
fDate :
1967
Firstpage :
76
Lastpage :
78
Abstract :
A technique has been developed for achieving a very high density interconnection of active silicon devices to permit the fabrication of large electronic subsystems in essentially monolithic form. The method used to fabricate a MOS 2000-bit register chip assembly containing 12,000 MOS transistors on a 300 × 600 mils silicon substrate will be described.
Keywords :
Assembly; Fabrication; Frequency; Integrated circuit interconnections; Large scale integration; Large-scale systems; Packaging; Shift registers; Silicon; Wafer bonding;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices Meeting, 1967 International
Type :
conf
DOI :
10.1109/IEDM.1967.187836
Filename :
1474917
Link To Document :
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