Title :
Wafer-chip assembly for large-scale integration
Author :
Kraynak, P. ; Fletcher, Peter
Abstract :
A technique has been developed for achieving a very high density interconnection of active silicon devices to permit the fabrication of large electronic subsystems in essentially monolithic form. The method used to fabricate a MOS 2000-bit register chip assembly containing 12,000 MOS transistors on a 300 × 600 mils silicon substrate will be described.
Keywords :
Assembly; Fabrication; Frequency; Integrated circuit interconnections; Large scale integration; Large-scale systems; Packaging; Shift registers; Silicon; Wafer bonding;
Conference_Titel :
Electron Devices Meeting, 1967 International
DOI :
10.1109/IEDM.1967.187836