Generating multiple images for integrated circuits by Fourier-transform holograms

A new technique for simultaneously generating multiple images of a single mask is described and application of this technique to photomasking for integrated circuits is discussed. A Fourier-transform hologram of an array of "point sources" is used, in conjunction with two lenses, to project any "input" image into an array of identical "output" images. Magnification or demagnification are easily achieved.