Title :
Thermal impedance of ceramic packages using beam-Lead IC chips
Abstract :
An integrated circuit package utilizing beam-lead sealed junction (BLSJ) silicon chips either singly or in multiple arrays consists of a ceramic (99.5% Al2O3) substrate with a thin film metallic conductor pattern. The beam-leaded chip (or chips) is thermocompression bonded to the metallizing pattern and coated with a silicone resin for protection from humidity and surface contamination. External leads are also TC bonded to the metallizing pattern for connection to the outside world.
Keywords :
Bonding; Ceramics; Conductive films; Impedance; Integrated circuit packaging; Metallization; Semiconductor thin films; Silicon; Substrates; Thin film circuits;
Conference_Titel :
Electron Devices Meeting, 1968 International
DOI :
10.1109/IEDM.1968.188010