• DocumentCode
    3552929
  • Title

    A thin-film diode strain sensor

  • Author

    Moore, R. Max

  • Volume
    14
  • fYear
    1968
  • fDate
    1968
  • Firstpage
    112
  • Lastpage
    114
  • Abstract
    A new type of thin-film strain sensor has been conceived. This sensor is a p-n heterojunction diode utilizing polycrystalline semiconductor layers obtained by vacuum evaporation onto an insulating substrate. The device exhibits large shifts in its forward I-V characteristic when subjected to a mechanical strain, and thus functions as a low output impedance voltage source.
  • Keywords
    Capacitive sensors; Heterojunctions; Impedance; Insulation; Mechanical sensors; Semiconductor diodes; Semiconductor thin films; Sensor phenomena and characterization; Substrates; Thin film sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1968 International
  • Type

    conf

  • DOI
    10.1109/IEDM.1968.188040
  • Filename
    1475565