DocumentCode
3552957
Title
A microwave Schottky-barrier field-effect transistor
Author
Drangeid, K.E. ; Middlehoek, S. ; Mohr, T.H. ; Wolf, P.
Author_Institution
IBM Zurich Research Laboratory, Zurich, Switzerland
Volume
14
fYear
1968
fDate
1968
Firstpage
140
Lastpage
140
Abstract
A silicon FET with a maximum frequency of oscillation fmax of 10 GHz has been realized. Prime factor for the good microwave properties of the device is a newly designed gate which consists of a Schottky contact with a width of only 1 micron. This very small structure is made with the projection masking technology. The Schottky contact consists of evaporated Cr and Ni layers. Source and drain contacts are of the alloyed Au-Sb type. The channel is a thin epitaxial n-layer (d ≈ 0.2µ ρ ≈ 0.1 ohm-cm) on a high-resistive Si substrate.
Keywords
Electrons; Microwave FET integrated circuits; Microwave devices; Microwave integrated circuits; Tunneling; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1968 International
Type
conf
DOI
10.1109/IEDM.1968.188065
Filename
1475590
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