DocumentCode :
3553018
Title :
Efficient pulsed LSA operations of thick epitaxial GaAs
Author :
Eastman, L.F.
Volume :
15
fYear :
1969
fDate :
1969
Firstpage :
40
Lastpage :
40
Abstract :
For the first time high power and high efficiency LSA has been obtained with thick epitaxial GaAs. This GaAs was grown with a constant-temperature, solution-growth method where a temperature gradient between the substrate and a source material causes the material transport. Due to the steady-state condition a good doping profile can be obtained. Electron concentration from 4×1014to 2×1015have been accomplished and mobility is typically 7,500 cm2/V-s. The doping profiles have been investigated with a new Laser probe-method developed by E. F. Johnson at Cornell University and will be reported.
Keywords :
Circuits; Diodes; Doping profiles; Gallium arsenide; Iris; Predictive models; Semiconductor process modeling; Shape; Steady-state; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices Meeting, 1969 International
Type :
conf
DOI :
10.1109/IEDM.1969.188102
Filename :
1475983
Link To Document :
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