DocumentCode
3553027
Title
Gate protection of MIS devices
Author
Lenzlinger, M.
Volume
15
fYear
1969
fDate
1969
Firstpage
48
Lastpage
50
Abstract
Gate shorts caused by electrical breakdown of the gate oxide are a major yield and reliability problem for MOS transistors and integrated circuits. Generally, diodes or diffused resistors with breakdown voltages of about 50 V are used to protect the gate from high voltage transients or discharges.
Keywords
Current density; Electric breakdown; Electromigration; MIS devices; MOSFETs; Protection; Read only memory; Resistors; Semiconductor diodes; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1969 International
Type
conf
DOI
10.1109/IEDM.1969.188110
Filename
1475991
Link To Document