Title :
Fabrication of vertical PNP´s NPN´s, and N-channel epitaxial JFET´s in a monolithic substrate
Author :
Beasom, James D.
Author_Institution :
Radiation, Inc., Melbourne, Fla.
Abstract :
It is possible to build high performance PNP´s NPN´s, and N-channel epitaxial JFET´s in dielectrically isolated material. The material is double poly type DI, made from P type substrates, into which N+buried layers are diffused in NPN islands. A N type epitaxial layer which is the top layer in the finished material, is deposited on the P substrate.
Keywords :
Fabrication; Substrates;
Conference_Titel :
Electron Devices Meeting, 1969 International
DOI :
10.1109/IEDM.1969.188141