• DocumentCode
    3553122
  • Title

    Crosspoint switch and memory cell

  • Author

    Levi, M. ; Green, Dale ; Gutknecht, P.

  • Volume
    15
  • fYear
    1969
  • fDate
    1969
  • Firstpage
    148
  • Lastpage
    148
  • Abstract
    A new type of memory cell circuit is described. The circuit is unique in that four modes of operation are possible making it especially useful for communication systems, and it can be made in a very small size. The unit cell of the memory was assembled and tested using discrete components followed by a careful study of the integration of the circuit into a silicon substrate. A test of scanning electron microscope fabrication was carried out under computer control to draw the patterns for 50 × 60 µ cells. Some partially operating circuits were achieved.
  • Keywords
    Cathodes; Circuit testing; Electron optics; Fabrication; Image resolution; Optical microscopy; Optical sensors; Resists; Scanning electron microscopy; Switches;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1969 International
  • Type

    conf

  • DOI
    10.1109/IEDM.1969.188198
  • Filename
    1476079