Title :
Reliability studies utilizing rapid-scan microscopy
Author :
Gonzales, A.J. ; Varker, C.J.
Abstract :
The conventional slow-scanning electron-microscope system has permitted limited monitoring of dynamic events. The information is recorded on sheet photographic film requiring 30-60 sec exposure time. A newly developed rapid-scan electron-microscope system that operates at conventional TV scan rates permits real-time observation of physical mechanisms and electrical effects.
Conference_Titel :
Electron Devices Meeting, 1970 International
DOI :
10.1109/IEDM.1970.188246
