• DocumentCode
    3553353
  • Title

    Implanted barrier two phase CCD

  • Author

    Krambeck, R.H. ; Walden, R.H. ; Pickar, K.A.

  • Author_Institution
    Bell Telephone Laboratories, Murray Hill, N. J.
  • Volume
    17
  • fYear
    1971
  • fDate
    1971
  • Firstpage
    72
  • Lastpage
    72
  • Abstract
    Any charge coupled device must have a surface potential pattern in each bit such that charge always transfers in the same direction. In the two phase device to be described, the mobile charge is forced forward by a strip of repulsive fixed charge at the input end of each electrode. This strip of charge can be obtained quite conveniently and reproducibly by means of ion implantation. It will be shown that the implant permits substantial simplification of the metallization pattern compared with other CCD´s and as a result, the device is easier to fabricate and high yields are easy to obtain.
  • Keywords
    Capacitors; Charge coupled devices; Charge-coupled image sensors; Electrodes; Laboratories; Laser radar; Optical arrays; Optical losses; Phased arrays; Telephony;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1971 International
  • Type

    conf

  • DOI
    10.1109/IEDM.1971.188394
  • Filename
    1476732